The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2020
Filed:
Nov. 23, 2015
Applicant:
Suss Microtec Lithography Gmbh, Garching, DE;
Inventors:
Assignee:
SUSS MICROTEC LITHOGRAPHY GMBH, Garching, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F27D 3/00 (2006.01); F27B 3/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); F27B 3/02 (2013.01); F27D 3/0084 (2013.01); H01L 21/6719 (2013.01); H01L 21/67109 (2013.01);
Abstract
A baking device for a wafer coated with a coating containing a solvent is described, having a baking chamber, a support for the wafer, an inlet for a purge gas, and an evacuation for the purge gas charged with solvent evaporated from the coating. The inlet is formed as a diffusion element arranged above the wafer so as to admit the purge gas evenly over substantially the entire surface of the wafer, and the evacuation is formed as an evacuation ring which radially surrounds the diffusion element and is arranged at a ceiling of the baking chamber.