The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2021
Filed:
Jun. 20, 2018
Applicant:
Suss Microtec Lithography Gmbh, Garching bei Muenchen, DE;
Inventors:
Assignee:
SUSS MICROTEC LITHOGRAPHY GMBH, Garching bei Munchen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 15/62 (2018.01); B05B 1/28 (2006.01); B05C 5/02 (2006.01); B05B 15/65 (2018.01); B05B 1/30 (2006.01); H01L 21/67 (2006.01); B05C 17/01 (2006.01);
U.S. Cl.
CPC ...
B05B 1/3033 (2013.01); B05B 1/28 (2013.01); B05B 15/62 (2018.02); B05B 15/65 (2018.02); B05C 5/0225 (2013.01); B05C 17/014 (2013.01); H01L 21/6715 (2013.01);
Abstract
A nozzle tip adapter has a suction duct, a supply duct, and a base body with a device end and a substrate end. The base body has a nozzle tip recess at its substrate end for receiving a nozzle tip and a projecting portion extending into the nozzle tip recess, wherein the suction duct extends through the projecting portion and the supply duct opens into the nozzle tip recess, wherein the suction duct is being at least partially surrounded by the supply duct. Further, a nozzle assembly and a nozzle are disclosed.