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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10953415 B1

PDFFull Text
Date of Patent:
Mar. 23, 2021

Filed:

Jun. 20, 2018

Nozzle tip adapter, nozzle assembly as well as nozzle

Applicant:

Suss Microtec Lithography Gmbh, Garching bei Muenchen, DE;

Inventors:

Thomas Grund, Oberderdingen, DE;

Gary Choquette, Kraichtal, DE;

Kader Mekias, Bretten, DE;

Assignee:

SUSS MICROTEC LITHOGRAPHY GMBH, Garching bei Munchen, DE;

Attorney:

Hayes Soloway PC

Primary Examiner:

Darren W Gorman

Int. Cl.
CPC ...
B05B 15/62 (2018.01); B05B 1/28 (2006.01); B05C 5/02 (2006.01); B05B 15/65 (2018.01); B05B 1/30 (2006.01); H01L 21/67 (2006.01); B05C 17/01 (2006.01);
U.S. Cl.
CPC ...
B05B 1/3033 (2013.01); B05B 1/28 (2013.01); B05B 15/62 (2018.02); B05B 15/65 (2018.02); B05C 5/0225 (2013.01); B05C 17/014 (2013.01); H01L 21/6715 (2013.01);
Abstract

A nozzle tip adapter has a suction duct, a supply duct, and a base body with a device end and a substrate end. The base body has a nozzle tip recess at its substrate end for receiving a nozzle tip and a projecting portion extending into the nozzle tip recess, wherein the suction duct extends through the projecting portion and the supply duct opens into the nozzle tip recess, wherein the suction duct is being at least partially surrounded by the supply duct. Further, a nozzle assembly and a nozzle are disclosed.

Find Patent Forward Citations

Grund, Thomas. (2021). Nozzle tip adapter, nozzle assembly as well as nozzle (U.S. Patent No. 10953415). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10953415

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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