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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11075102 B1

PDFFull Text
Date of Patent:
Jul. 27, 2021

Filed:

Nov. 08, 2017

Positioning device

Applicant:

Suss Microtec Lithography Gmbh, Garching, DE;

Inventors:

Sven Hansen, Garching, DE;

Georg Fink, Garching, DE;

Henrik Petry, Garching, DE;

Assignee:

SUSS MICROTEC LITHOGRAPHY GMBH, Garching, DE;

Attorney:

Hayes Soloway PC

Primary Examiner:

Matthew J Daniels

Assistant Examiner:

Wayne K Swier

Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/687 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68 (2013.01); H01L 21/67017 (2013.01); H01L 21/67092 (2013.01); H01L 21/67126 (2013.01); H01L 21/682 (2013.01); H01L 21/6838 (2013.01); H01L 21/68735 (2013.01); H01L 21/68742 (2013.01); H01L 24/75 (2013.01); H01L 24/83 (2013.01); H01L 2224/75101 (2013.01); H01L 2224/75704 (2013.01); H01L 2224/75724 (2013.01); H01L 2224/75755 (2013.01); H01L 2224/75981 (2013.01); H01L 2224/838 (2013.01); H01L 2224/83091 (2013.01); H01L 2224/83136 (2013.01);
Abstract

The invention relates to a positioning device for positioning a substrate, in particular a wafer, comprising: a process chamber; a base body; a carrier element which comprises a support for supporting the substrate, the carrier element being arranged above the base body and formed movable in terms of distance from the base body; and a holder for an additional substrate, in particular an additional wafer or a mask, the holder being arranged opposite the carrier element; wherein there is, between the base body and the carrier element, a sealed-off cavity to which a pressure, in particular a negative pressure, can be applied so as to prevent undesired movement of the carrier element as a result of the action of an external force.

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