Henrik Petry

Title: Innovations of Henrik Petry

Introduction

Henrik Petry is a notable inventor based in Garching, Germany. He has made significant contributions to the field of lithography, particularly in the development of devices for treating disc-shaped substrates. With a total of 2 patents to his name, Petry's work showcases his expertise and innovative spirit.

Latest Patents

Henrik Petry's latest patents include a positioning device and a device for treating a disc-shaped substrate. The positioning device is designed for accurately positioning a substrate, such as a wafer, within a process chamber. It features a base body, a movable carrier element, and a holder for an additional substrate. This design incorporates a sealed-off cavity that can apply pressure to prevent undesired movement caused by external forces.

The second patent, a device for treating a disc-shaped substrate, includes a support with a support face for the substrate and a support adapter for a mask used in the treatment process. This device is equipped with an interface that detects the coupling of the support adapter and a control system that ensures proper functionality.

Career Highlights

Henrik Petry is currently employed at SUSS Microtec Lithography GmbH, a company renowned for its advanced lithography solutions. His work at SUSS Microtec has allowed him to push the boundaries of technology in substrate treatment and positioning.

Collaborations

Throughout his career, Petry has collaborated with talented individuals such as Sven Hansen and Georg Fink. These collaborations have contributed to the innovative projects he has undertaken.

Conclusion

Henrik Petry's contributions to the field of lithography through his patents and work at SUSS Microtec Lithography GmbH highlight his role as a significant inventor. His innovative designs continue to impact the industry positively.