The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Jan. 24, 2019
Applicant:
Suss Microtec Lithography Gmbh, Garching, DE;
Inventors:
Katrin Fischer, Stuttgart, DE;
Florian Palitschka, Gauting, DE;
Johannes Platen, Kevelaer-Wetten, DE;
Kento Kaneko, Munich, DE;
Assignee:
SUSS MICROTEC LITHOGRAPHY GMBH, Garching, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 3/04 (2006.01); B05D 3/02 (2006.01); G03F 7/16 (2006.01); B05C 9/12 (2006.01); G03F 7/00 (2006.01); B05D 3/10 (2006.01); B05D 7/04 (2006.01); B05D 5/00 (2006.01); B05D 7/26 (2006.01);
U.S. Cl.
CPC ...
B05D 3/0453 (2013.01); B05C 9/12 (2013.01); B05D 3/0254 (2013.01); B05D 3/046 (2013.01); B05D 3/0466 (2013.01); B05D 3/0473 (2013.01); B05D 3/0486 (2013.01); B05D 3/0493 (2013.01); B05D 3/107 (2013.01); B05D 5/00 (2013.01); B05D 7/04 (2013.01); B05D 7/26 (2013.01); G03F 7/00 (2013.01); G03F 7/16 (2013.01); G03F 7/168 (2013.01);
Abstract
The disclosure relates to a method for coating a substrate with a lacquer. First, the lacquer is uniformly applied to the substrate. Then, the solvent proportion of the lacquer applied to the substrate is reduced, and the coated substrate is exposed to a solvent atmosphere. In some embodiments, the lacquer is heated. The invention also relates to a device for planarising a lacquer layer.