The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 24, 2024

Filed:

May. 11, 2020
Applicant:

Suss Microtec Lithography Gmbh, Garching, DE;

Inventors:

Uwe Vogler, Garching, DE;

Fabian Kloiber, Garching, DE;

Georg Fink, Garching, DE;

Christian May, Garching, DE;

Ghazahleh Jalali, Garching, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 33/42 (2006.01); B29C 33/30 (2006.01); B29C 33/38 (2006.01); B29C 35/08 (2006.01);
U.S. Cl.
CPC ...
B29C 33/424 (2013.01); B29C 33/30 (2013.01); B29C 33/3857 (2013.01); B29C 35/0805 (2013.01); B29C 2033/426 (2013.01); B29C 2035/0827 (2013.01);
Abstract

A stamp replication device for producing stamps for the production of at least one of microstructured and nanostructured components has a platform, a cover that is positionable on the platform and a holding device for a stamp carrier, wherein the holding device is provided on the cover or on the platform and includes a carrier as well as a microstructured vacuum surface on the carrier for holding the stamp carrier. In addition, a method for producing a holding device for a stamp replication device as well as a method for producing a stamp are specified.


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