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Wilmington, MA, United States of America

Onto Innovation Inc.

USPTO Granted Patents = 48

EPO Patents = 1

Trademarks = 50

Forward Citations = 26

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74 inventors (with patents filed for the assignee):

George Andrew Antonelli (7 out of 40 patents)

Nigel P Smith (5 out of 8 patents)

Nicholas James Keller (5 out of 5 patents)

4. Manjusha Mehendale (4 out of 8 patents)

5. Robin Mair (4 out of 10 patents)

6. John F Lesoine (3 out of 5 patents)

7. J Casey Donaher (3 out of 7 patents)

8. Christopher J McLaughlin (3 out of 5 patents)

9. Pedro Vagos (3 out of 10 patents)

10. Wayne Fitzgerald (3 out of 5 patents)

11. Paul A Doyle (3 out of 4 patents)

12. Jian Lu (3 out of 3 patents)

13. Xin Song (3 out of 3 patents)

14. Troy Daniel Ribaudo (3 out of 5 patents)

15. James E Millerd (3 out of 20 patents)

Core Competencies:

Optical Metrology

Deep Learning Model

Interferometry

Defect Detection

Wafer Inspection

Lithography Optimization

Acoustic Metrology

Substrate Characterization

Spectral Effects Mitigation

Raman Spectroscopy

Surface Height Measurement

Calibration Techniques

48 patents: Sort by Forward Citations

1. 12474643 - System and method for performing alignment and overlay measurement through an opaque layer (2025-11-18),

2. 12443153 - Deep learning model in high-mix semiconductor manufacturing (2025-10-14),

3. 12442717 - Interferometer with auxiliary lens for measurement of a transparent test object (2025-10-14),

4. 12386271 - Multi-layer calibration for empirical overlay measurement (2025-08-12),

5. 12354254 - Low contrast non-referential defect detection (2025-07-08),

6. 12339235 - Simultaneous back and/or front and/or bulk defect detection (2025-06-24),

7. 12259338 - Mitigation of undesired spectral effects in optical metrology (2025-03-25),

8. 12237198 - Area camera substrate pre-aligner (2025-02-25),

9. 12235091 - Apparatus to characterize substrates and films (2025-02-25),

10. 12216051 - Dynamic phase-shift interferometer utilizing a synchronous optical frequency-shift (2025-02-04),

11. 12174128 - High resolution multispectral multi-field-of-view imaging system for wafer inspection (2024-12-24),

12. 12131454 - Substrate mapping using deep neural-networks (2024-10-29),

13. 12111355 - Semiconductor substrate yield prediction based on spectra data from multiple substrate dies (2024-10-08),

14. 12092962 - Measurements of structures in presence of signal contaminations (2024-09-17),

15. 12092565 - Non-destructive inspection and manufacturing metrology systems and methods (2024-09-17),

Onto Innovation Inc. is a leading provider of process control, inspection, and metrology solutions for advanced semiconductor packaging and IC devices. With a diverse range of cutting-edge technologies, Onto Innovation offers customers the tools and expertise to address their most complex challenges in process optimization and yield enhancement. Their innovative solutions enable semiconductor manufacturers to improve their production yields, reduce costs, and deliver high-quality, reliable products to the market.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

48 Patents

#11 in Wilmington, MA

#400 in Massachusetts

#7,027 in US

#14,122 in the World

Wilmington, MA, United States of America

Onto Innovation Inc.

Forward Citations = 26

74 inventors:

George Andrew Antonelli (7 out of 40 patents)

Nigel P Smith (5 out of 8 patents)

Nicholas James Keller (5 out of 5 patents)

4. Manjusha Mehendale (4 out of 8 patents)

5. Robin Mair (4 out of 10 patents)

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