The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2026
Filed:
Dec. 28, 2023
Onto Innovation Inc., Wilmington, MA (US);
Keith F. Best, Andover, MA (US);
Mark Howard, Dorchester, MA (US);
Douglas A. Brown, Wilmington, MA (US);
Guray Tas, Plaistow, NH (US);
Onto Innovation Inc., Wilmington, MA (US);
Abstract
Various techniques to quickly image one or more edge regions of a substrate panel without imaging other regions of the substrate panel, such as areas of the substrate panel that have already been exposed to ultraviolet (UV) light. In some examples, an illumination mask assembly can be coupled to a clamp assembly and used to image at least one edge region of the substrate panel, such as an edge region including one or more dummy patterns. For example, the substrate panel can be clamped using the clamp assembly in order to immerse the substrate panel into a plating bath. Before immersion, the illumination mask assembly can image one or more edge regions of the substrate panel, such as to image the various dummy patterns in a layer of the substrate panel.