The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Mar. 13, 2024
Applicant:
Onto Innovation Inc., Wilmington, MA (US);
Assignee:
Onto Innovation Inc., Wilmington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01N 21/95 (2006.01); G01N 21/956 (2006.01);
U.S. Cl.
CPC ...
G01N 21/95684 (2013.01); G01N 21/8851 (2013.01); G01N 21/9501 (2013.01); G01N 2201/1087 (2013.01);
Abstract
A surface inspection system can be provided with a laser spot size or a laser line width that is selectable based on a measurable aspect of the objects under test that project upward or downward from a surface under test. The larger laser spot size or line width can be selected to cover a larger area of the surface under test at a time, which can increase scanning speed over the surface under test and enhance system measurement throughput.