Portland, OR, United States of America

George Andrew Antonelli

This inventor holds 41 USPTO granted patents and 22 published patent applications and 2 EPO patents, primarily in Optical Metrology. Top assignees: Novellus Systems Incorporated, Lam Research Corporation, Onto Innovation Inc.. Active years: 2006-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: George Andrew Antonelli. Retrieved from https://idiyas.com/inventor/george-andrew-antonelli

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 41 

% Patents Active = 87.8

 

Average Co-Inventor Count = 3.9

ph-index = 14

Forward Citations = 1,374(Granted Patents)


Company Filing History:


Years Active: 2006-2026

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Areas of Expertise:
Optical Metrology
Plasma Deposition
Semiconductor Processing
Film Stacks
Raman Spectroscopy
Interfacial Layers
Hardmask Materials
Low-K Dielectrics
Thin Film Measurement
Vacuum Processes
Opto-Acoustic Measurement
Elastic Moduli
41 patents (USPTO):Explore Patents

Title: George Andrew Antonelli: Innovating Optical Metrology Solutions in Portland, OR

Introduction:

George Andrew Antonelli, a prolific inventor based in Portland, OR, is renowned for his groundbreaking work in optical metrology. With an impressive portfolio of 38 patents, Antonelli has consistently pushed the boundaries of innovation in the field.

Latest Patents:

1. Apparatus and Method for Multiple Source Excitation Raman Spectroscopy: Antonelli's latest patent introduces an optical metrology device that performs multi-wavelength polarized confocal Raman spectroscopy. By utilizing two light sources and a dichroic beam splitter, this innovative device effectively combines light beams for precise sample analysis.

2. Target for Optical Measurement of Trenches: Another recent patent by Antonelli focuses on designing a metrology target specifically tailored for measuring features at the bottom of trenches in devices under test. This solution, incorporating a tier stack with plasmonic resonance capabilities, enables accurate characterization of critical device components.

Career Highlights:

Throughout his career, George Andrew Antonelli has made significant contributions to leading companies in the industry. Notably, he has worked at Novellus Systems Incorporated and Lam Research Corporation, where his ingenuity and expertise have been instrumental in driving technological advancements.

Collaborations:

Antonelli has collaborated with esteemed colleagues such as Bart Jan van Schravendijk and Mandyam Sriram. Their combined efforts have yielded innovative solutions and enhanced the effectiveness of optical metrology techniques in various applications.

Conclusion:

In conclusion, George Andrew Antonelli stands out as a visionary inventor whose inventive spirit and dedication to advancing optical metrology have left a lasting impact on the industry. His remarkable patents and successful collaborations underscore his position as a trailblazer in the field of innovative technology.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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