The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Jun. 09, 2022
Onto Innovation Inc., Wilmington, MA (US);
Jonathan Andrew Miller, Fremont, CA (US);
Onto Innovation Inc., Wilmington, MA (US);
Abstract
A sample that includes a target structure with a structure-of-interest (SOI) having a set of known parameters optically coupled to an unknown structure, e.g., having unknown parameters, is optically measured using light that is incident on the target structure. Light detected from the target structure in response to the incident illumination light incident is used to obtain metrology data, which is a combination of a from the SOI and a contribution from the unknown structure. A set of parameter values characterizing the SOI and a set of parameter values characterizing the unknown structure are determined from a trained neural network based on the metrology data.