The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2026
Filed:
Nov. 29, 2023
Onto Innovation Inc., Wilmington, DE (US);
Stephen W. Into, Hudson, NH (US);
Gregory William Weiss, Billerica, MA (US);
Onto Innovation Inc., Wilmington, MA (US);
Abstract
Various examples include an apparatus to provide motion in at least two linear-axes, where each of the linear-axes are substantially orthogonal to one another. The apparatus can include a load stage having a first actuator (e.g., a modified linear-motor) coupled to the load stage to provide a linear motion to the load stage in a first direction. A wide-magnet pack is coupled to or included as a portion of the first actuator. The wide-magnet pack has a width sufficient to allow movement of the load stage in a second direction without impairing the linear motor operation, the second direction being substantially orthogonal to the first direction. A second actuator is also coupled to the load stage to provide the linear motion in the second direction, substantially within magnetic-field constraints of the wide-magnet pack. Other systems, apparatuses, and devices are also disclosed.