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Advanced Mask Technology Center Gmbh + Co. Kg

USPTO Granted Patents = 11

Forward Citations = 82

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26 inventors (with patents filed for the assignee):

Markus Bender (3 out of 3 patents)

Thorsten Schedel (2 out of 15 patents)

Markus Waiblinger (2 out of 5 patents)

4. Clemens Utzny (2 out of 2 patents)

5. Christian Buergel (2 out of 2 patents)

6. Martin Sczyrba (2 out of 2 patents)

7. Axel Feicke (2 out of 2 patents)

8. Albrecht Ullrich (1 out of 6 patents)

9. Carla Byloos (1 out of 2 patents)

10. Rainer Pforr (1 out of 19 patents)

11. Henning Haffner (1 out of 40 patents)

12. Uwe Dersch (1 out of 5 patents)

13. Roderick Koehle (1 out of 6 patents)

14. Dominique Savignac (1 out of 52 patents)

15. Haiko Rolff (1 out of 1 patent)

11 patents: Sort by Forward Citations

1. 11537039 - Photomask assembly with reflective photomask and method of manufacturing a reflective photomask (2022-12-27),

2. 10031409 - Reflective photomask and reflection-type mask blank (2018-07-24),

3. 9405185 - Shape metrology for photomasks (2016-08-02),

4. 8932785 - EUV mask set and methods of manufacturing EUV masks and integrated circuits (2015-01-13),

5. 8293431 - Lithographic mask and method of forming a lithographic mask (2012-10-23),

6. 8257888 - Particle beam writing method, particle beam writing apparatus and maintenance method for same (2012-09-04),

7. 8142958 - EUV mask and method for repairing an EUV mask (2012-03-27),

8. 7820343 - Method for producing a photomask, method for patterning a layer or layer stack and resist stack on a mask substrate (2010-10-26),

9. 7811727 - Method for determining an exposure dose and exposure apparatus (2010-10-12),

10. 7789964 - Method for cleaning a surface of a photomask (2010-09-07),

11. 7354684 - Test pattern and method of evaluating the transfer properties of a test pattern (2008-04-08),

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USPTO Data Jan 1 1976 - Dec 2 2025

11 Patents

#103 in

#3,497 in Germany

#50,136 in the World

Advanced Mask Technology Center Gmbh + Co. Kg

Forward Citations = 82

26 inventors:

Markus Bender (3 out of 3 patents)

Thorsten Schedel (2 out of 15 patents)

Markus Waiblinger (2 out of 5 patents)

4. Clemens Utzny (2 out of 2 patents)

5. Christian Buergel (2 out of 2 patents)

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