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For the Inventor, By the Inventor

West Linn, OR, United States of America

Yukinori Sakiyama

This inventor holds 23 USPTO granted patents and 21 published patent applications, primarily in Semiconductor Fabrication. Top assignees: Lam Research Corporation, Other. Active years: 2016-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Yukinori Sakiyama. Retrieved from https://idiyas.com/inventor/yukinori-sakiyama

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 23 

% Patents Active = 91.3

Average Co-Inventor Count = 5.1

ph-index = 5

Forward Citations = 89(Granted Patents)


Company Filing History:

goldMedal22 out of 3,955 
 
Lam Research Corporation
 patents
silverMedal1 out of 834,601 
Other
 patents

Years Active: 2016-2026

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Areas of Expertise:
Plasma Instability
Wafer Bow Management
Carbon Layer Processing
Anomalous Plasma Detection
Metrology Methods
Edge Uniformity Modulation
Showerhead Design
Carrier Ring Wall
Electrical Asymmetry Effect
Reactive Species
Volume Equalization
Impedance Modulation
23 patents (USPTO):Explore Patents
1. 12776757 - Systems and methods for providing shunt cancellation of parasitic components in a plasma reactor (2026-10-27),
2. 12581875 - Processing tool capable for forming carbon layers on substrates (2026-03-17),
3. 12340992 - Detection and location of anomalous plasma events in fabrication chambers (2025-06-24),
4. 12322582 - Anomalous plasma event detection and mitigation in semiconductor processing (2025-06-03),
5. 11823928 - Control of wafer bow in multiple stations (2023-11-21),
6. 11443975 - Planar substrate edge contact with open volume equalization pathways and side containment (2022-09-13),
7. 11393729 - Systems and methods for controlling plasma instability in semiconductor fabrication (2022-07-19),
8. 11183406 - Control of wafer bow in multiple stations (2021-11-23),
9. 10622243 - Planar substrate edge contact with open volume equalization pathways and side containment (2020-04-14),
10. 10553465 - Control of water bow in multiple stations (2020-02-04),
11. 10510625 - Systems and methods for controlling plasma instability in semiconductor fabrication (2019-12-17),
12. 10475627 - Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition (2019-11-12),
13. 10378107 - Low volume showerhead with faceplate holes for improved flow uniformity (2019-08-13),
14. 10301718 - Asymmetric pedestal/carrier ring arrangement for edge impedance modulation (2019-05-28),
15. 10128160 - Systems and methods for detection of plasma instability by electrical measurement (2018-11-13),

As an AI assistant specialized in innovations, inventions, inventors, patent attorneys, assignees, and patents, here is an article about the renowned inventor Yukinori Sakiyama:

Title: Exploring the Innovations of Yukinori Sakiyama in Wafer Bow Control and Substrate Processing

Introduction:

Yukinori Sakiyama, a distinguished inventor based in West Linn, OR (US), has made significant contributions to the field of semiconductor processing with a total of 19 patents to his name. His innovative solutions have revolutionized wafer bow control and substrate processing techniques, showcasing his prowess in developing cutting-edge technologies.

Latest Patents:

Sakiyama's latest patents include groundbreaking technologies such as "Control of wafer bow in multiple stations" and "Planar substrate edge contact with open volume equalization pathways and side containment." The former patent details a system for managing wafer bow in plasma processing stations by adjusting the low frequency power delivered based on the wafer's non-flatness, thereby minimizing wafer bowing. The latter patent introduces a pedestal design for substrate processing systems that facilitates pressure equalization during processing through strategically placed vents.

Career Highlights:

Throughout his career, Yukinori Sakiyama has made significant strides in the semiconductor industry, with notable affiliations with companies like Lam Research Corporation. His expertise in wafer processing technologies has been instrumental in advancing the field and enhancing manufacturing processes for semiconductor devices.

Collaborations:

Sakiyama has collaborated with esteemed professionals in the industry, including Edward J Augustyniak and Douglas L Keil. Their collective efforts have led to the development of innovative solutions that have had a lasting impact on wafer processing techniques and substrate handling in semiconductor manufacturing.

Conclusion:

Yukinori Sakiyama's inventive spirit and dedication to advancing semiconductor processing technologies have solidified his reputation as a pioneering figure in the field. His patents stand as a testament to his ingenuity and commitment to driving innovation in wafer bow control and substrate processing, making him a trailblazer in the semiconductor industry.

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Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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