Yaw S Obeng

Title: Yaw S Obeng: Innovator in Semiconductor Technology

Introduction

Yaw S Obeng is a distinguished inventor based in Orlando, Florida, with a remarkable portfolio comprising 40 patents. His contributions to the field of semiconductor technology have significantly advanced the development of MOS transistors, reflecting his expertise and commitment to innovation.

Latest Patents

Among his latest inventions, Obeng has patented a novel method to attain low defectivity fully silicided gates. This method involves creating fully silicided gates in MOS transistors that are compatible with wet etch processes typically used in source/drain silicide formation. The innovative process ensures that the gate silicide formation step results in a metal-rich silicide layer that resists removal during subsequent wet etch processes. Additionally, a blocking layer is utilized to prevent unwanted source/drain silicide formation during the gate silicidation process. The anneal step to create the desired fully silicided gate is strategically delayed until after the formation of the source/drain silicide, making this approach compatible with nickel and nickel-platinum silicide processes.

Furthermore, Obeng has developed a FUSI integration method utilizing a Spin-On Glass (SOG) sacrificial planarization layer. This inventive technique safeguards the source/drain regions from silicidation while facilitating the silicidation of the gate electrode. The SOG layer is meticulously planarized to reveal either a transition metal nitride layer or the gate electrode prior to the gate silicidation, enhancing the overall effectiveness and precision of the process.

Career Highlights

Yaw S Obeng has built a formidable career with key positions at leading companies in the semiconductor industry, including Lucent Technologies Inc. and Psiloquest Inc. His extensive experience in these organizations has played a vital role in shaping his innovative contributions to the field.

Collaborations

Throughout his career, Obeng has collaborated with several notable professionals, including Edward M. Yokley and Jennifer S. Obeng. These partnerships have further enriched his work, enabling the development of cutting-edge technologies and methodologies.

Conclusion

Yaw S Obeng is a pioneering inventor whose creations have greatly influenced semiconductor technology. With a robust patent portfolio and a commitment to collaboration, Obeng continues to pave the way for innovative advancements in the field, making him a significant figure in the world of inventions and patents.