The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2010
Filed:
Jan. 31, 2007
Yaw S. Obeng, Frisco, TX (US);
Kezhakkedath R. Udayakumar, Dallas, TX (US);
Scott Robert Summerfelt, Garland, TX (US);
Sanjeev Aggarwal, Scottsdale, AZ (US);
Francis Gabriel Celii, Dallas, TX (US);
Lindsey H. Hall, Plano, TX (US);
Robert Kraft, Plano, TX (US);
Theodore S. Moise, Dallas, TX (US);
Yaw S. Obeng, Frisco, TX (US);
Kezhakkedath R. Udayakumar, Dallas, TX (US);
Scott Robert Summerfelt, Garland, TX (US);
Sanjeev Aggarwal, Scottsdale, AZ (US);
Francis Gabriel Celii, Dallas, TX (US);
Lindsey H. Hall, Plano, TX (US);
Robert Kraft, Plano, TX (US);
Theodore S. Moise, Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A method of manufacturing a semiconductor device is presented. In one aspect, the method comprises forming conductive and ferroelectric material layers on a semiconductor substrate. The material layers are patterned to form electrodes and a ferroelectric layer of a ferroelectric capacitor, wherein a conductive noble metal-containing polymer is generated on sidewalls of the ferroelectric capacitor. The method also comprises converting the conductive noble metal-containing polymer into a non-conducting metal oxide. Converting includes forming a water-soluble metal salt from the conductive noble metal-containing polymer and reacting the water-soluble metal salt with an acqueous acidic solution to form a metal hydroxide. Converting also includes oxidizing the metal hydroxide to form the non-conducting metal oxide.