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Yao-Yi Cheng

USPTO Granted Patents = 11

Average Co-Inventor Count = 3.0

ph-index = 7

Forward Citations = 227(Granted Patents)

Location History:

Taipei, TW (1998 - 2003)
Hsin Chu, TW (2004)

Company Filing History:

11 out of 40,635

Taiwan Semiconductor Manufacturing Comp. Ltd.

Years Active: 1998-2004

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11 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6706637 - Dual damascene aperture formation method absent intermediate etch stop layer (2004-03-16),

2. 6667249 - Minimizing coating defects in low dielectric constant films (2003-12-23),

3. 6472335 - Methods of adhesion promoter between low-K layer and underlying insulating layer (2002-10-29),

4. 6331480 - Method to improve adhesion between an overlying oxide hard mask and an underlying low dielectric constant material (2001-12-18),

5. 6255232 - Method for forming low dielectric constant spin-on-polymer (SOP) dielectric layer (2001-07-03),

6. 6242338 - Method of passivating a metal line prior to deposition of a fluorinated silica glass layer (2001-06-05),

7. 6187663 - Method of optimizing device performance via use of copper damascene structures, and HSQ/FSG, hybrid low dielectric constant materials (2001-02-13),

8. 6159842 - Method for fabricating a hybrid low-dielectric-constant intermetal (2000-12-12),

9. 6143670 - Method to improve adhesion between low dielectric constant layer and (2000-11-07),

10. 6020273 - Method of stabilizing low dielectric constant films (2000-02-01),

11. 5795833 - Method for fabricating passivation layers over metal lines (1998-08-18),

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