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For the Inventor, By the Inventor

Taipei, Taiwan

Yao-Yi Cheng

This inventor holds 11 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 1998-2004.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Yao-Yi Cheng. Retrieved from https://idiyas.com/inventor/yao-yi-cheng

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 11

% Patents Active = 100.0

Average Co-Inventor Count = 3.0

ph-index = 7

Forward Citations = 227(Granted Patents)


Location History:

  • Taipei, TW (1998 - 2003)
  • Hsin Chu, TW (2004)

Company Filing History:

goldMedal11 out of 43,553 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents

Years Active: 1998-2004

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11 patents (USPTO):Explore Patents
1. 6706637 - Dual damascene aperture formation method absent intermediate etch stop layer (2004-03-16),
2. 6667249 - Minimizing coating defects in low dielectric constant films (2003-12-23),
3. 6472335 - Methods of adhesion promoter between low-K layer and underlying insulating layer (2002-10-29),
4. 6331480 - Method to improve adhesion between an overlying oxide hard mask and an underlying low dielectric constant material (2001-12-18),
5. 6255232 - Method for forming low dielectric constant spin-on-polymer (SOP) dielectric layer (2001-07-03),
6. 6242338 - Method of passivating a metal line prior to deposition of a fluorinated silica glass layer (2001-06-05),
7. 6187663 - Method of optimizing device performance via use of copper damascene structures, and HSQ/FSG, hybrid low dielectric constant materials (2001-02-13),
8. 6159842 - Method for fabricating a hybrid low-dielectric-constant intermetal (2000-12-12),
9. 6143670 - Method to improve adhesion between low dielectric constant layer and (2000-11-07),
10. 6020273 - Method of stabilizing low dielectric constant films (2000-02-01),
11. 5795833 - Method for fabricating passivation layers over metal lines (1998-08-18),

Title: Yao-Yi Cheng: Innovator in Semiconductor Technology

Introduction

Yao-Yi Cheng is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 11 patents. His innovative work focuses on methods that enhance the efficiency and reliability of semiconductor manufacturing processes.

Latest Patents

One of Yao-Yi Cheng's latest patents is titled "Dual damascene aperture formation method absent intermediate etch stop layer." This patent describes a method for forming a dual damascene aperture by treating a first dielectric layer to create a surface composition that differs from its bulk composition. A second dielectric layer is then formed on top of this treated layer, and a trench is created that overlaps with a via formed through the first layer. The invention emphasizes determining the endpoint of the trench formation by detecting differences in composition, which is crucial for precision in semiconductor fabrication.

Another notable patent is "Minimizing coating defects in low dielectric constant films." This patent outlines a method for coating low dielectric constant materials by pre-wetting the wafer surface with a solvent. This technique helps to cover surface defects on the semiconductor substrate, thereby preventing defects in the final low dielectric constant material layer.

Career Highlights

Yao-Yi Cheng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in semiconductor technology.

Collaborations

Throughout his career, Yao-Yi Cheng has collaborated with notable colleagues, including Chen-Hua Douglas Yu and Chia-Shiung Tsai. These collaborations have fostered a productive environment for innovation and have led to the development of several impactful patents.

Conclusion

Yao-Yi Cheng's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key innovator in the field. His methods for improving semiconductor manufacturing processes continue to influence the industry positively.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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