The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 1998
Filed:
Aug. 01, 1996
Chen-Hua Yu, Hsin-Chu, TW;
Yao-Yi Cheng, Taipei, TW;
Taiwan Semiconductor Manufacturing Company, Ltd, Hsin-Chu, TW;
Abstract
The present invention provides a method of fabricating passivation layers over closely spaced metal lines on a substrate. More particularly, the invention forms a three layer sandwich of passivation layers comprised of (1) a first thin plasma enhance silicon nitride (PE-SiN) layer; (2) a silicon oxide layer; and (3) a second silicon nitride layer. The method begins by forming closely spaced metal lines 20 over a substrate surface. A first silicon nitride layer 24 is formed using a low powered plasma enhanced chemical vapor deposition process, over the metal lines 20 and the substrate surface. A silicon oxide layer 28 is then formed over the first silicon nitride layer. A second nitride layer 32 is formed, using a plasma enhanced chemical vapor deposition process, over the silicon oxide layer 28. The method further includes forming an insulating layer 36 over the second nitride layer. The passivation layers of the invention is preferably formed over the top metal layer.