This inventor holds 15 USPTO granted patents and 2 published patent applications and 3 EPO patents. Top assignees: Acm Research (Shanghai) Inc., Acm Research, Inc., Telefonaktiebolaget Lm Ericsson (Publ). Active years: 2014-2024.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
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Years Active: 2014-2024
Title: Innovations of Xuejun Li in Semiconductor Cleaning Technologies
Introduction
Xuejun Li is a prominent inventor based in Shanghai, China, known for his significant contributions to the field of semiconductor cleaning technologies. With a total of 15 patents to his name, he has developed innovative methods and systems that enhance the efficiency and safety of cleaning semiconductor wafers.
Latest Patents
Among his latest patents, Xuejun Li has introduced a method for cleaning semiconductor substrates without damaging their patterned structures. This method utilizes an ultra/mega sonic device, which applies liquid into a space between the substrate and the device. The process involves setting the ultra/mega sonic power supply to specific frequencies and power levels to prevent bubble cavitation from damaging the substrate. Additionally, he has developed a system for controlling damages during the cleaning process, which includes a wafer holder, an inlet for cleaning liquid, and a sonic generator that operates at varying frequencies and power levels. This system is designed to ensure that the percentage of damaged features remains below a predetermined threshold.
Career Highlights
Xuejun Li has worked with notable companies in the semiconductor industry, including Acm Research (Shanghai) Inc. and Acm Research, Inc. His work in these organizations has allowed him to refine his inventions and contribute to advancements in semiconductor cleaning technologies.
Collaborations
Throughout his career, Xuejun Li has collaborated with talented individuals such as Fuping Chen and Xi Wang. These collaborations have played a crucial role in the development and implementation of his innovative technologies.
Conclusion
Xuejun Li's contributions to semiconductor cleaning technologies demonstrate his expertise and commitment to innovation in the field. His patents reflect a deep understanding of the challenges faced in semiconductor manufacturing and offer practical solutions to enhance efficiency and safety.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile