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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10770315 B1

PDFFull Text
Date of Patent:
Sep. 08, 2020

Filed:

Sep. 08, 2015

Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus

Applicant:

Acm Research (Shanghai) Inc., Shanghai, CN;

Inventors:

Zhenming Chu, Shanghai, CN;

Xi Wang, Shanghai, CN;

Hui Wang, Shanghai, CN;

Shena Jia, Shanghai, CN;

Jun Wu, Shanghai, CN;

Fuping Chen, Shanghai, CN;

Xuejun Li, Shanghai, CN;

Assignee:

ACM Research (Shanghai) Inc., Shanghai, CN;

Attorney:

Osha Liang LLP

Primary Examiner:

David G Cormier

Assistant Examiner:

Thomas Bucci

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/67 (2006.01); B08B 13/00 (2006.01); B08B 3/02 (2006.01); B08B 9/00 (2006.01); B08B 3/08 (2006.01); B08B 3/12 (2006.01); B08B 5/02 (2006.01); G08B 21/18 (2006.01); H01L 21/687 (2006.01); G01B 5/14 (2006.01); G01B 7/14 (2006.01); G01B 11/14 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67051 (2013.01); B08B 3/02 (2013.01); B08B 3/024 (2013.01); B08B 3/08 (2013.01); B08B 3/12 (2013.01); B08B 5/02 (2013.01); B08B 9/00 (2013.01); B08B 13/00 (2013.01); G08B 21/182 (2013.01); H01L 21/687 (2013.01); B08B 2203/0288 (2013.01); G01B 5/14 (2013.01); G01B 7/14 (2013.01); G01B 11/14 (2013.01);
Abstract

A fall-proof apparatus for cleaning semiconductor devices is provided. The fall-proof apparatus comprises: a nozzle () connecting with a carrier (); a megasonic/ultrasonic device () fixing on the carrier (); and a sensor () detecting the distance between the megasonic/ultrasonic device () and the carrier () to determine whether the megasonic/ultrasonic device () is loose and going to fall. The megasonic/ultrasonic device works with the nozzle during a cleaning process. A chamber with the fall-proof apparatus is also provided.

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