Xiong Li

Title: Xiong Li: Innovator in Dry Etching Technology

Introduction

Xiong Li is a prominent inventor based in Sichuan, China, known for his significant contributions to the field of dry etching technology. With a total of 10 patents to his name, he has made remarkable advancements that enhance the efficiency and effectiveness of etching processes.

Latest Patents

Among his latest patents is the "Ultra-large area scanning reactive ion etching machine and etching method thereof." This invention relates to dry etching technology and introduces an ultra-large area scanning reactive ion etching machine. The machine comprises an injection chamber, an etching reaction chamber, a transition chamber, and an etching ion generation chamber. By moving a sample holder among these chambers in a scanning direction, the machine performs scanning etching on a sample, achieving large-area, uniform, and efficient etching.

Another notable patent is the "Mask topology optimization method and system for surface plasmon near-field photolithography." This method involves acquiring first mask data and applying fuzzy processing and projection processing to obtain second mask data. It includes forward calculations to derive imaging data and adjoint calculations to optimize the mask data iteratively until the final mask pattern is achieved.

Career Highlights

Xiong Li is affiliated with the Chinese Academy of Sciences, where he conducts research and development in advanced etching technologies. His work has significantly impacted the field, leading to innovations that improve manufacturing processes in various industries.

Collaborations

Xiong Li collaborates with esteemed colleagues, including Xiangang Luo and Mingbo Pu, contributing to a dynamic research environment that fosters innovation and technological advancement.

Conclusion

Xiong Li's contributions to dry etching technology and his innovative patents underscore his role as a leading inventor in his field. His work continues to influence advancements in manufacturing processes, showcasing the importance of innovation in technology.