Toyama, Japan

Unryu Ogawa

USPTO Granted Patents = 14 

Average Co-Inventor Count = 4.4

ph-index = 4

Forward Citations = 44(Granted Patents)


Location History:

  • Tokyo, JP (2002 - 2006)
  • Toyama, JP (2010 - 2019)

Company Filing History:


Years Active: 2002-2025

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14 patents (USPTO):Explore Patents

Title: Unryu Ogawa: A Pioneer in Semiconductor Manufacturing Innovations

Introduction: Unryu Ogawa is a notable inventor based in Toyama, Japan, known for his significant contributions to the field of semiconductor manufacturing. With a robust portfolio of 14 patents, Ogawa has demonstrated a remarkable ability to innovate and improve semiconductor processing technologies.

Latest Patents: Among his latest patents are a substrate processing apparatus, a gas nozzle, and a method of manufacturing semiconductor devices. These inventions focus on suppressing the heating of source gas nozzles to processing temperatures when gases are supplied during substrate processing. Notably, his substrate processing apparatus comprises a reaction tube made from one material and a gas nozzle made from another, which optimizes performance through advanced reflective properties and surface configurations. Additionally, Ogawa's patent involving a semiconductor device manufacturing method encompasses generating hydrogen radicals through plasma excitation, which is crucial for creating a reducing atmosphere to enhance surface conditions on substrates composed of silicon and metal.

Career Highlights: Ogawa's career is marked by his tenure at leading companies in the electronics industry, including Hitachi Kokusai Electric Inc. and Kokusai Electric Corporation. His work at these companies has enabled him to develop innovative technologies that push the boundaries of semiconductor manufacturing.

Collaborations: Throughout his career, Ogawa has collaborated with notable industry professionals, including Tadashi Terasaki and Akito Hirano. These partnerships highlight his commitment to advancing technology through teamwork and shared expertise.

Conclusion: Unryu Ogawa is a distinguished figure in the innovation landscape of semiconductor technology. With his extensive patent portfolio and collaborative efforts, he continues to influence the industry, paving the way for future advancements in semiconductor manufacturing processes.

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