The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2018
Filed:
Nov. 22, 2017
Hitachi Kokusai Electric Inc., Tokyo, JP;
Toshihiko Yonejima, Toyama, JP;
Masanori Okuno, Toyama, JP;
Masakazu Sakata, Toyama, JP;
Hiroki Okamiya, Toyama, JP;
Takeshi Kasai, Toyama, JP;
Katsuaki Nogami, Toyama, JP;
Takashi Ozaki, Toyama, JP;
Kenji Kanayama, Toyama, JP;
Unryu Ogawa, Toyama, JP;
Seiyo Nakashima, Toyama, JP;
Tomoyuki Yamada, Toyama, JP;
Masayuki Yamada, Toyama, JP;
Kokusai Electric Corporation, Tokyo, JP;
Abstract
A configuration capable of increasing an exhaust capability of an apparatus without degrading an operation of the apparatus includes: a processing furnace; an exhaust unit configured to exhaust a gas from a process chamber defined by the processing furnace, the exhaust unit having a first sidewall and a second sidewall opposite to the first sidewall; and an exhaust device disposed adjacent to the exhaust unit and connected to the exhaust unit via a connecting pipe provided with a vibration-absorbing member, the exhaust device having a first sidewall and a second sidewall opposite to the first sidewall, wherein the processing furnace, the exhaust unit and the exhaust device are disposed on a same plane, and only the first sidewall of the first and the second sidewalls of the exhaust device is disposed in a space defined by extensions of the first and the second sidewalls of the exhaust unit.