Tuochuan Huang

Title: Innovations of Tuochuan Huang in Semiconductor Cleaning Technologies

Introduction

Tuochuan Huang, based in Saratoga, CA, is a prolific inventor with a focus on semiconductor cleaning technologies. He holds a total of 19 patents, showcasing his contributions to advancing techniques in the industry. His innovations are particularly relevant for improving the efficiency and effectiveness of cleaning processes in semiconductor manufacturing.

Latest Patents

Among Tuochuan Huang's most recent inventions are methods for removing deposits on the surface of chamber components. This method involves receiving a chamber component, securing it in a fixture, and applying a specially formulated slurry with a pH of about 5 to about 9. The cleaning process utilizes a polish pad and slurry to achieve surface roughness that remains within about 10% of its original state while effectively removing unwanted deposits. An alternative method also presents the option of heating the chamber component to temperatures ranging from about 500° C. to about 1500° C.

Another notable patent is for an integrated semiconductor part cleaning system. This innovative system includes a spray station, multiple cleaning stations, a drying station, a component transfer mechanism, and enclosures to protect the cleaning process. The spray station features a holder for positioning chamber components and a movable nozzle that delivers a cleaning spray under pressure, enhancing cleaning efficacy. The first cleaning station incorporates a push mechanism to drive cleaning fluid through chamber component features alongside a movable transducer that provides ultrasonic energy.

Career Highlights

Throughout his career, Tuochuan Huang has significantly contributed to industry leaders, including Lam Research Corporation and Applied Materials, Inc. His expertise in semiconductor manufacturing processes has positioned him as a key innovator in the field, particularly in cleaning technologies.

Collaborations

Tuochuan Huang has collaborated with esteemed professionals like Hong Shih and John Edward Daugherty. These partnerships have facilitated the exchange of ideas and fostered innovative solutions within the semiconductor cleaning domain.

Conclusion

Tuochuan Huang's portfolio reflects a dedication to enhancing semiconductor cleaning processes through innovative methodologies and systems. With 19 patents to his name, his contributions continue to shape the industry, ensuring more efficient and effective technologies for semiconductor manufacturing.