The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Oct. 10, 2008
Hong Shih, Santa Clara, CA (US);
Saurabh Ullal, South San Francisco, CA (US);
Tuochuan Huang, Saratoga, CA (US);
Yan Fang, Fremont, CA (US);
Jon Mcchesney, Santa Clara, CA (US);
Hong Shih, Santa Clara, CA (US);
Saurabh Ullal, South San Francisco, CA (US);
Tuochuan Huang, Saratoga, CA (US);
Yan Fang, Fremont, CA (US);
Jon McChesney, Santa Clara, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
The present invention provides a reliable, non-invasive, electrical test method for predicting satisfactory performance of electrostatic chucks (ESCs). In accordance with an aspect of the present invention, a parameter, e.g., impedance, of an ESC is measured over a frequency band to generate a parameter functions. This parameter function may be used to establish predetermined acceptable limits of the parameter within the frequency band.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile