The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2013
Filed:
Oct. 31, 2011
Hong Shih, Santa Clara, CA (US);
John Daugherty, Fremont, CA (US);
Dean J. Larson, Fremont, CA (US);
Tuochuan Huang, Saratoga, CA (US);
Armen Avoyan, Glendale, CA (US);
Jeremy Chang, Sunnyvale, CA (US);
Sivakami Ramanathan, Fremont, CA (US);
Robert Anderson, Newark, CA (US);
Yan Fang, Fremont, CA (US);
Duane Outka, Fremont, CA (US);
Paul Mulgrew, San Jose, CA (US);
Hong Shih, Santa Clara, CA (US);
John Daugherty, Fremont, CA (US);
Dean J. Larson, Fremont, CA (US);
Tuochuan Huang, Saratoga, CA (US);
Armen Avoyan, Glendale, CA (US);
Jeremy Chang, Sunnyvale, CA (US);
Sivakami Ramanathan, Fremont, CA (US);
Robert Anderson, Newark, CA (US);
Yan Fang, Fremont, CA (US);
Duane Outka, Fremont, CA (US);
Paul Mulgrew, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method of cleaning a surface of a component of a plasma chamber, wherein the component has an aluminum or anodized aluminum surface, the method including the steps of: soaking the surface of the component in a diluted sulfuric peroxide (DSP) solution; spray rinsing the surface with water following removal of the surface from the DSP solution; soaking the surface in a dilute nitric acid (HNO) solution; spray rinsing the surface with water following removal of the surface from the dilute nitric acid solution; and repeating at least twice the steps of soaking the surface in dilute nitric acid followed by spray rinsing the surface.