John Edward Daugherty

This inventor holds 76 USPTO granted patents and 26 published patent applications and 6 EPO patents, primarily in Semiconductor Processing (CPC class H01L). Top assignee: Lam Research Corporation. Active years: 1983-2026.

USPTO Granted Patents = 76 (Patent Applications = 26)

% Patents Active = 90.8

EPO Patents = 6 (Patent Applications = 1)

Average Co-Inventor Count = 3.9

ph-index = 16

Forward Citations = 684(Granted Patents)

Forward Citations (Not Self Cited) = 648(Dec 10, 2025)

Inventors with similar research interests:

Location History:

Washington, DC (US) (1983)
Oakland, CA (US) (2000 - 2002)
Alamada, CA (US) (2004)
Newark, CA (US) (2004 - 2012)
Alameda, CA (US) (2003 - 2013)
Fremont, CA (US) (2004 - 2024)

Company Filing History:

75 out of 3,936

Lam Research Corporation

patents

where one patent can have more than one assignee

Years Active: 1983-2026

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Areas of Expertise:

Plasma Chamber

Wafer Transport

Cleaning Techniques

Gas Distribution

Machine Learning

Conditioning Components

Aerosol Deposition

Corrosion Resistance

MEMS Flow Controller

Electrode Design

Surface Patterning

Vacuum Pump Protection

76 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12544809 - Conditioning chamber component (2026-02-10),

2. 12270748 - Method and apparatus for measuring particles (2025-04-08),

3. 12249490 - Single crystal metal oxide plasma chamber component (2025-03-11),

4. 12198902 - Laminated aerosol deposition coating for aluminum components for plasma processing chambers (2025-01-14),

5. 12129569 - Method for conditioning semiconductor processing chamber components (2024-10-29),

6. 12087561 - Vacuum pump protection against deposition byproduct buildup (2024-09-10),

7. 12072318 - Chamber component cleanliness measurement system (2024-08-27),

8. 12064795 - Conditioning chamber component (2024-08-20),

9. 11764086 - Wafer transport assembly with integrated buffers (2023-09-19),

10. 11710623 - Vacuum pump protection against deposition byproduct buildup (2023-07-25),

11. 11662237 - MEMS coriolis gas flow controller (2023-05-30),

12. 11393705 - Wafer transport assembly with integrated buffers (2022-07-19),

13. 11124659 - Method to selectively pattern a surface for plasma resistant coat applications (2021-09-21),

14. 11112773 - Systems for removing and replacing consumable parts from a semiconductor process module in situ (2021-09-07),

15. 11087961 - Quartz component with protective coating (2021-08-10),

Title: Innovator Spotlight: John Edward Daugherty

Introduction: John Edward Daugherty is a renowned inventor based in Fremont, California. With an impressive portfolio of 75 patents, Daugherty has made significant contributions to the fields of technology and engineering, particularly through his work at Lam Research Corporation.

Latest Patents: Daugherty's recent patents highlight his innovative approach to solving complex problems. One notable invention is the "Method and apparatus for measuring particles," which provides an apparatus for measuring contamination on a critical surface of a part. This design incorporates a vessel for mounting the part, an inert gas source in fluid connection with the vessel, and at least one diffuser to expose the critical surface to the inert gas. Additionally, his patent on the "Single crystal metal oxide plasma chamber component" focuses on a component of a plasma processing chamber that features single crystal metal oxide material, designed to enhance the efficiency and effectiveness of plasma processing.

Career Highlights: Throughout his career, John Edward Daugherty has been committed to advancing technological innovations. His role at Lam Research Corporation has allowed him to work on cutting-edge projects, driving significant advancements in the semiconductor industry.

Collaborations: Daugherty has collaborated with notable colleagues, including Hong Shih and Robert J. O'Donnell, contributing to a team that values innovation and excellence in research and development.

Conclusion: John Edward Daugherty stands out as a key figure in the innovation landscape, with a robust portfolio of patents that exemplify his dedication to improving technology. His work not only contributes to Lam Research Corporation but also significantly impacts the broader field of engineering and technology.