The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Feb. 16, 2021
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Lin Xu, Fremont, CA (US);
David Joseph Wetzel, Santa Clara, CA (US);
John Daugherty, Fremont, CA (US);
Hong Shih, Cupertino, CA (US);
Satish Srinivasan, Newark, CA (US);
Yuanping Song, Newark, CA (US);
Johnny Pham, San Jose, CA (US);
Yiwei Song, Morgan Hill, CA (US);
Christopher Kimball, San Jose, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 7/04 (2006.01); C25D 3/44 (2006.01); C25D 5/48 (2006.01); C25D 11/08 (2006.01); H01J 37/32 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
C25D 7/04 (2013.01); C25D 3/44 (2013.01); C25D 5/48 (2013.01); C25D 11/08 (2013.01); H01J 37/32642 (2013.01); H01J 37/32715 (2013.01); H01L 21/6833 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/334 (2013.01); Y10T 428/12542 (2015.01); Y10T 428/12576 (2015.01); Y10T 428/12583 (2015.01); Y10T 428/12667 (2015.01); Y10T 428/12806 (2015.01);
Abstract
A method for making a component for use in a semiconductor processing chamber is provided. A component body is formed from a conductive material having a coefficient of thermal expansion of less than 10.0×10/K. A metal oxide layer is then disposed over a surface of the component body.