Satish Srinivasan

Title: Innovations of Satish Srinivasan

Introduction

Satish Srinivasan is a notable inventor based in Fremont, California. He has made significant contributions to the field of plasma processing technology, holding a total of eight patents. His work focuses on enhancing the efficiency and effectiveness of plasma processing chambers.

Latest Patents

One of his latest patents is for a single crystal metal oxide plasma chamber component. This component features at least one plasma-facing surface made from single crystal metal oxide material. It can be machined from a single crystal metal oxide ingot, with suitable materials including spinel, yttrium oxide, and yttrium aluminum garnet (YAG). Additionally, he has developed a gas injector for plasma processing chambers using this technology. Another significant patent involves a laminated aerosol deposition coating for aluminum components used in plasma processing chambers. This apparatus includes an aluminum body with a surface coated with an aluminum oxide-containing aerosol deposition layer, topped with a yttrium-containing aerosol deposition coating.

Career Highlights

Satish has worked with prominent companies in the industry, including Lam Research Corporation and Lam Research Group. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking innovations in plasma processing technology.

Collaborations

Throughout his career, Satish has collaborated with talented individuals such as Lin Xu and John Edward Daugherty. These partnerships have fostered a creative environment that has led to the development of advanced technologies.

Conclusion

Satish Srinivasan's contributions to the field of plasma processing are noteworthy, with multiple patents that showcase his innovative spirit. His work continues to influence the industry and pave the way for future advancements.