The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2024
Filed:
May. 19, 2020
Lam Research Corporation, Fremont, CA (US);
Amir A. Yasseri, San Jose, CA (US);
Duane Outka, Fremont, CA (US);
Armen Avoyan, Oakland, CA (US);
Kennet Cresencio Baylon, Pittsburg, CA (US);
John Daugherty, Fremont, CA (US);
Girish M. Hundi, Dublin, CA (US);
Cliff La Croix, Gardnerville, NV (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.