Amir A Yasseri

Title: The Innovations of Amir A. Yasseri: A Pioneer in Chamber Component Cleanliness

Introduction

Amir A. Yasseri is an accomplished inventor based in San Jose, California, recognized for his significant contributions to the field of semiconductor manufacturing. With a total of six patents to his name, Yasseri has been instrumental in developing innovative technologies that enhance the cleanliness and efficiency of wafer processing chambers.

Latest Patents

Yasseri's recent patents exemplify his commitment to advancing technology in this critical sector. One of his latest inventions is the "Chamber Component Cleanliness Measurement System," which provides an apparatus for measuring contaminants on the surface of a component. This innovative device features an extraction vessel designed to hold a measurement fluid, equipped with an opening that forms a meniscus. An actuator facilitates the movement of either the extraction vessel or the component, ensuring that the meniscus contacts the component's surface. Additionally, a transducer emits acoustic energy to the measurement fluid, enhancing the accuracy of the cleanliness assessment.

Another significant patent is the "Conditioning Chamber Component" method. This involves conditioning a component of a wafer processing chamber by submerging it in an ultrasonic conditioning solution within an ultrasonic tank, where ultrasonic energy is then applied to clean the component. Furthermore, the component is also submerged in a megasonic conditioning solution, with megasonic energy applied to enhance cleaning effectiveness.

Career Highlights

Amir A. Yasseri's professional journey has been marked by innovation and collaboration. He currently works at Lam Research Corporation, a leading company in the semiconductor equipment industry, where he continues to push the boundaries of technology. His work is pivotal in creating systems that uphold cleanliness standards in wafer processing, vital for the production of high-performance semiconductor devices.

Collaborations

In his career, Yasseri has collaborated with notable colleagues, including Duane Outka and Hong Shih. Their combined expertise fosters an environment of innovation within the research teams at Lam Research Corporation, leading to groundbreaking advancements in the field.

Conclusion

As an inventor, Amir A. Yasseri exemplifies the spirit of innovation that drives progress in semiconductor manufacturing. Through his patents and collaboration with esteemed colleagues, he continues to contribute valuable advancements toward ensuring the cleanliness and efficiency of wafer processing equipment. His work not only enhances industry practices but also sets new standards for future innovations in this dynamic field.