Location History:
- Mountain View, CA (US) (2001 - 2002)
- Santa Clara, CA (US) (2002)
- Fremont, CA (US) (2013)
- Pleasanton, CA (US) (2007 - 2022)
Company Filing History:
Years Active: 2001-2022
Title: Dean Jay Larson: Innovator in Etch Uniformity Control
Introduction
Dean Jay Larson, based in Mountain View, CA, is an accomplished inventor recognized for his significant contributions to the field of substrate support technology. With an impressive portfolio of 24 patents, Larson has established himself as a key innovator in the semiconductor industry. His work primarily focuses on enhancing etch uniformity, which is critical for the precision required in modern semiconductor fabrication.
Latest Patents
Among his latest inventions, Larson has developed a groundbreaking system for achieving etch uniformity control. His method involves the arrangement of a substrate on an inner portion of a substrate support, with a calculated desired pocket depth. This pocket depth is integral to maintaining the optimal distance between the upper surfaces of an edge ring and the substrate. By employing a controller to selectively adjust the actuation of the edge ring and inner portion, Larson's inventions provide an innovative approach to achieving consistency in etching processes. The innovation highlights a method and a substrate support mechanism that work cohesively to optimize manufacturing precision.
Career Highlights
Larson's contributions are not limited to his patents; they represent a culmination of extensive research and development in semiconductor technologies. He has made significant strides within Lam Research Corporation, a leading firm in the semiconductor processing equipment industry. His role at Lam Research has enabled him to leverage his expertise and creativity to address complex challenges faced in semiconductor manufacturing.
Collaborations
Throughout his career, Dean Jay Larson has collaborated with notable professionals, including Victor Wang and William M. Denty, Jr. These partnerships have facilitated the exchange of innovative ideas, contributing to the advancement of technologies in substrate support and etch uniformity control.
Conclusion
Dean Jay Larson stands out as a visionary inventor whose work greatly impacts the semiconductor industry's landscape. His 24 patents, particularly focused on innovations in etch uniformity control, serve as a testament to his dedication to enhancing technology. Through his career at Lam Research Corporation and his collaborations with distinguished colleagues, Larson continues to push the boundaries of semiconductor fabrication excellence.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.