The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2015
Filed:
May. 29, 2012
Applicants:
Dean J. Larson, Pleasanton, CA (US);
James A. Woodward, Milpitas, CA (US);
Inventors:
Dean J. Larson, Pleasanton, CA (US);
James A. Woodward, Milpitas, CA (US);
Assignee:
LAM RESEARCH CORPORATION, Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01); F16K 51/02 (2006.01); F16K 3/02 (2006.01); B24B 15/00 (2006.01); B24B 29/00 (2006.01);
U.S. Cl.
CPC ...
F16K 51/02 (2013.01); B24B 15/00 (2013.01); B24B 29/00 (2013.01); F16K 3/0263 (2013.01);
Abstract
The method of preserving the anodized finish of a barrier door of a process module includes bonding a seal to a metal surface, anodizing the metal surface, and then using a CNC machine to polish the metal surface without damaging the seal. The metal surface is polished by traversing a polishing path along the metal surface with a polishing head maintaining frictional contact with the metal surface. The integrity of the seal is preserved by bounding the polishing head to skirt the edge of the seal by following the polishing path.