The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2015
Filed:
Sep. 21, 2012
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Hong Shih, Walnut, CA (US);
Tuochuan Huang, Saratoga, CA (US);
Yan Fang, Fremont, CA (US);
Cliff LaCroix, Livermore, CA (US);
Neal Newton, San Jose, CA (US);
Rish Chhatre, San Jose, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); H01L 21/683 (2006.01); B08B 1/00 (2006.01); B08B 5/00 (2006.01); B08B 5/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); B08B 1/00 (2013.01); B08B 5/00 (2013.01); B08B 5/02 (2013.01); B08B 7/00 (2013.01); B08B 7/0071 (2013.01);
Abstract
A method of removing an epoxy band from an electrostatic chuck includes securing the electrostatic chuck in a servicing fixture, applying a thermal source to the epoxy band to breakdown a plurality of adhesive bonds securing the epoxy band to the electrostatic chuck, forming a hole in the epoxy band and pulling the epoxy band from the electrostatic chuck. A system for removing an epoxy band from an electrostatic chuck is also described.