The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Aug. 26, 2011
Applicants:

Hong Shih, Santa Clara, CA (US);

Tuochuan Huang, Saratoga, CA (US);

David Schaefer, Fremont, CA (US);

Ambarish Chhatre, San Ramon, CA (US);

John Daugherty, Fremont, CA (US);

Minghang Wu, Renton, WA (US);

Clifford LA Croix, Livermore, CA (US);

Inventors:

Hong Shih, Santa Clara, CA (US);

Tuochuan Huang, Saratoga, CA (US);

David Schaefer, Fremont, CA (US);

Ambarish Chhatre, San Ramon, CA (US);

John Daugherty, Fremont, CA (US);

MingHang Wu, Renton, WA (US);

Clifford La Croix, Livermore, CA (US);

Assignee:

Lam Research Corporation, Fremont, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/12 (2006.01); H01L 21/683 (2006.01); B05D 7/00 (2006.01); C23C 22/66 (2006.01); C23C 8/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6831 (2013.01); H01L 21/6833 (2013.01); B05D 7/52 (2013.01); B05D 5/12 (2013.01); C23C 22/66 (2013.01); C23C 8/02 (2013.01);
Abstract

A method is provided for treating a bipolar ESC having a front surface and a back surface, the front surface including an anodized layer. The method includes eliminating the anodized layer, disposing a new anodized layer onto the front surface, and treating the new anodized layer with water to seal the new anodized layer.


Find Patent Forward Citations

Loading…