Location History:
- Vancouver, WA (US) (2007 - 2009)
- Sunnyvale, CA (US) (2009)
- Alameda, CA (US) (2018)
- Fremont, CA (US) (2014 - 2023)
Company Filing History:
Years Active: 2007-2023
Title: David M Schaefer: Innovator in Semiconductor Processing Technology
Introduction
David M Schaefer, based in Sunnyvale, California, is a distinguished inventor known for his contributions to semiconductor processing technology. With an impressive portfolio of 14 patents, Schaefer has significantly advanced the field through innovative designs and solutions that enhance the efficiency and longevity of semiconductor manufacturing processes.
Latest Patents
Among his notable recent patents is an edge seal designed for a lower electrode assembly. This invention involves a sealing mechanism that ensures the integrity of the outer surface of the lower electrode assembly, which is crucial in supporting a semiconductor substrate within a plasma processing chamber. The design includes an elastomeric band that fits within an annular groove, demonstrating an innovative approach to maintaining performance under stress.
Additionally, Schaefer has developed an edge ring to extend the lifetime of the elastomer seal in a plasma processing chamber. This edge ring not only surrounds the outer periphery of a substrate support but also incorporates a unique design that integrates an elastomer seal assembly. This invention aims to enhance the durability and efficiency of processes involving plasma generation for substrate processing.
Career Highlights
David M Schaefer is currently employed at Lam Research Corporation, a leader in providing wafer fabrication equipment and services for the semiconductor industry. His role at the company involves research and development to create advanced solutions that address the evolving challenges in semiconductor technology.
Collaborations
Throughout his career, Schaefer has collaborated with talented individuals, including fellow innovators Ambarish Chhatre and Keith William Gaff. Their collective expertise has significantly contributed to the success of the projects they have undertaken, leading to the development of cutting-edge technologies that push the boundaries of semiconductor manufacturing.
Conclusion
David M Schaefer stands out as a prominent inventor in the field of semiconductor processing. With 14 patents to his name and a passionate commitment to innovation, he continues to make a lasting impact through his work at Lam Research Corporation. Schaefer's inventions exemplify the critical role of innovation in advancing technology and improving manufacturing processes in the semiconductor industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.