The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Oct. 20, 2011
David Schaefer, Fremont, CA (US);
Ambarish Chhatre, San Jose, CA (US);
Keith William Gaff, Fremont, CA (US);
Sung Lee, Pleasanton, CA (US);
David Schaefer, Fremont, CA (US);
Ambarish Chhatre, San Jose, CA (US);
Keith William Gaff, Fremont, CA (US);
Sung Lee, Pleasanton, CA (US);
LAM RESEARCH CORPORATION, Fremont, CA (US);
Abstract
A lower electrode assembly useful for supporting a semiconductor substrate in a plasma processing chamber includes a temperature controlled lower base plate, an upper plate, a mounting groove surrounding a bond layer and an edge seal comprising an elastomeric band having an outer concave surface in an uncompressed state, the band mounted in the groove such that upper and lower ends of the band are axially compressed and a maximum outward bulging of the band is no greater than a predetermined distance.