Company Filing History:
Years Active: 2014-2020
Title: **Innovative Contributions of Sung Lee in Plasma Processing Technologies**
Introduction
Sung Lee, an accomplished inventor based in Pleasanton, California, has made significant contributions to the field of semiconductor manufacturing. With six patents to his name, his work focuses on enhancing plasma processing techniques, aiming to improve efficiency and consistency in semiconductor substrate preparation.
Latest Patents
Among his notable inventions, two stand out for their innovative approach to correcting non-uniformities in plasma processing:
1. **Systems and Methods for Correcting Non-Uniformities in Plasma Processing of Substrates**: This patent outlines a sophisticated electrostatic chuck that features an embedded electrode. This electrode is designed to attract a semiconductor substrate electrostatically. Additionally, it includes multiple current loops that are spatially arranged to provide localized DC magnetic fields, thereby adjusting the parameters of plasma processing without directly generating plasma.
2. **Component of a Substrate Support Assembly Producing Localized Magnetic Fields**: This invention pertains to a component that enhances substrate support assemblies by integrating current loops. These loops work to induce localized DC magnetic fields during plasma processing. By affecting the plasma distribution above the substrate, this technology addresses the common issue of non-uniformity in plasma treatments.
Career Highlights
Sung Lee is associated with Lam Research Corporation, a leader in semiconductor manufacturing equipment. His contributions have been crucial in advancing the technologies that enable more precise control over semiconductor processing, which is vital in the ever-evolving tech landscape.
Collaborations
Throughout his career, Sung has worked alongside several esteemed colleagues, including David M. Schaefer and Keith William Gaff. Together, they have collaborated on various projects that push the boundaries of semiconductor technologies, fostering innovation and advancements in the field.
Conclusion
In conclusion, Sung Lee's innovations in plasma processing highlight his commitment to improving semiconductor manufacturing techniques. His patents serve as a testament to his expertise and dedication, ultimately contributing to the evolution of technology in the industry.