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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9790582 B1

PDFFull Text
Date of Patent:
Oct. 17, 2017

Filed:

Apr. 27, 2015

Long lifetime thermal spray coating for etching or deposition chamber application

Applicant:

Lam Research Corporation, Fremont, CA (US);

Inventors:

Chin-Yi Liu, San Jose, CA (US);

Russell Ormond, San Jose, CA (US);

Nash W. Anderson, Mountain View, CA (US);

David M. Schaefer, Fremont, CA (US);

Assignee:

Lam Research Corporation, Fremont, CA (US);

Attorney:

Beyer Law Group LLP

Primary Examiner:

Zandra Smith

Assistant Examiner:

Andre′ C Stevenson

Int. Cl.
CPC ...
B32B 15/04 (2006.01); C23C 4/134 (2016.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); C23C 4/11 (2016.01); C23C 4/06 (2016.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 4/134 (2016.01); C23C 4/06 (2013.01); C23C 4/11 (2016.01); H01J 37/3299 (2013.01); H01J 37/32477 (2013.01); H01J 37/32495 (2013.01); H01J 37/32972 (2013.01); H01L 21/67069 (2013.01); H01L 21/67253 (2013.01); H01L 22/10 (2013.01);
Abstract

In accordance with this disclosure, there are provided several inventions, including a substrate processing apparatus with multi-layer surfaces configured to face the plasma and resist against corrosion. These multi-layer surfaces may in one example include a base layer of aluminum, anodized aluminum, or quartz, a second layer of stabilized zirconia, and a second layer of a yttrium-aluminum composite such as yttrium aluminum garnet (YAG).

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Liu, Chin-Yi. (2017). Long lifetime thermal spray coating for etching or deposition chamber application (U.S. Patent No. 9790582). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9790582

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