Location History:
- Mountain View, CA (US) (2017)
- Cupertino, CA (US) (2018)
Company Filing History:
Years Active: 2017-2025
Title: Innovations of Nash W Anderson
Introduction
Nash W Anderson is a prominent inventor based in Mountain View, CA. He has made significant contributions to the field of semiconductor processing, holding a total of 3 patents. His work focuses on advanced materials and systems that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
One of his latest patents is for a "Single crystal metal oxide plasma chamber component." This invention involves a component of a plasma processing chamber that features at least one plasma-facing surface made from single crystal metal oxide material. The component can be machined from a single crystal metal oxide ingot, with suitable materials including spinel, yttrium oxide, and yttrium aluminum garnet (YAG). This innovation allows for the machining of a single crystal metal oxide to form a gas injector for a plasma processing chamber.
Another notable patent is the "Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus." This system is designed to form an atomic layer deposition (ALD) or a molecular layer deposition (MLD) barrier coating on the interior fluid wetted surfaces of a fluid handling component for a vacuum chamber. The system includes a gas supply that delivers process gases to the component, enabling the formation of a barrier coating on the fluid wetted surfaces.
Career Highlights
Nash W Anderson is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to develop innovative solutions that address the challenges faced in semiconductor processing.
Collaborations
Throughout his career, Anderson has collaborated with notable colleagues, including Lin Xu and John Edward Daugherty. These collaborations have contributed to the advancement of technology in the semiconductor field.
Conclusion
Nash W Anderson's contributions to semiconductor processing through his innovative patents and work at Lam Research Corporation highlight his significant impact on the industry. His inventions continue to pave the way for advancements in semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.