The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Sep. 30, 2013
Lam Research Corporation, Fremont, CA (US);
Hong Shih, Walnut, CA (US);
Fan-Cheung Sze, Fremont, CA (US);
Brian McMillin, Pleasanton, CA (US);
John Daugherty, Fremont, CA (US);
Yan Fang, Fremont, CA (US);
Duane Outka, Fremont, CA (US);
Tuochuan Huang, Saratoga, CA (US);
Sivakami Ramanathan, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method of wet cleaning an aluminum part having bare aluminum surfaces and anodized aluminum surfaces. The method includes COdry ice blasting the surfaces of the aluminum part at approximately 35 to approximately 45 psi, masking the aluminum part to conceal the bare aluminum surfaces, soaking the dry ice blasted and masked aluminum part in deionized water at or above approximately 60° C., scrubbing the aluminum part with an abrasive pad and deionized water after completion of the soaking in deionized water, and repeating the soaking and scrubbing in the recited order at least three additional times.