The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Mar. 30, 2007
Hong Shih, Walnut, CA (US);
Oana M. Leonte, Hayward, CA (US);
John E. Daugherty, Fremont, CA (US);
Tuochuan Huang, Saratoga, CA (US);
Gregory J. Goldspring, Alameda, CA (US);
Michael C. May, Gardiner, NY (US);
Hong Shih, Walnut, CA (US);
Oana M. Leonte, Hayward, CA (US);
John E. Daugherty, Fremont, CA (US);
Tuochuan Huang, Saratoga, CA (US);
Gregory J. Goldspring, Alameda, CA (US);
Michael C. May, Gardiner, NY (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An on-line method of cleaning contaminants from at least one interior surface in plasma chambers comprises blasting one or more interior surfaces of a plasma chamber with dry ice to remove contaminants from the one or more surfaces.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile