This inventor holds 109 USPTO granted patents and 16 published patent applications and 2 EPO patents, primarily in Atomic Layer Etching (CPC class H01L21-67069). Top assignees: Lam Research Corporation, Applied Materials, Inc., Centre National De La Recherche Scientifique. Active years: 2000-2026.
Inventors with similar research interests:
Location History:
- Sunnyvale, CA (US) (2000 - 2005)
- Fremont, CA (US) (2020)
- Santa Clara, CA (US) (2005 - 2024)
- Kalaheo, HI (US) (2023 - 2024)
Company Filing History:
73 out of 3,932 
31 out of 14,403 
1 out of 5,383 
Years Active: 2000-2026
Areas of Expertise:
Sure, I'd be delighted to assist with that. Here is the article about inventor Thorsten B. Lill:
Title: Thorsten B. Lill: Pioneering Innovations in Semiconductor Technology
Introduction: Thorsten B. Lill is a prominent inventor based in Sunnyvale, CA, with a remarkable track record of 99 patents to his name. His groundbreaking work in semiconductor technology has solidified his position as a thought leader in the industry.
Latest Patents:
1. Conformal damage-free encapsulation of chalcogenide materials: Thorsten B. Lill's cutting-edge patent focuses on methods and apparatuses for forming an encapsulation bilayer over chalcogenide material on a semiconductor substrate. By utilizing advanced techniques such as PP-PECVD and PEALD, he has revolutionized the process of encapsulating sensitive materials, paving the way for enhanced semiconductor performance.
2. Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment: In another groundbreaking patent, Lill introduces non-elastomeric, non-polymeric, non-metallic membrane valves suitable for high-vacuum applications. This innovation ensures optimal functionality even under sub-atmospheric pressure conditions, overcoming traditional limitations of elastomeric membrane valves.
Career Highlights: Thorsten B. Lill is a key figure at Lam Research Corporation, a leading semiconductor equipment manufacturing company. His expertise and dedication have played a crucial role in shaping the company's innovative approach to semiconductor technology.
Collaborations: Lill collaborates closely with accomplished professionals such as Meihua Shen and Harmeet Singh. Together, they form a dynamic team that consistently pushes the boundaries of semiconductor technology.
Conclusion: Thorsten B. Lill's exceptional contributions to the field of semiconductor technology underscore his commitment to driving innovation and excellence. With a wealth of patents and a sterling reputation, he continues to inspire the next generation of inventors in the industry.