Thorsten B Lill

Sunnyvale, CA, United States of America

Thorsten B Lill

USPTO Granted Patents = 106 

 

Average Co-Inventor Count = 3.4

ph-index = 21

Forward Citations = 1,857(Granted Patents)

Forward Citations (Not Self Cited) = 1,681(Dec 10, 2025)


Inventors with similar research interests:


Location History:

  • Sunnyvale, CA (US) (2000 - 2005)
  • Fremont, CA (US) (2020)
  • Santa Clara, CA (US) (2005 - 2024)
  • Kalaheo, HI (US) (2023 - 2024)

Company Filing History:


Years Active: 2000-2025

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Areas of Expertise:
Ion Beam Etching
Atomic Layer Etching
Semiconductor Processing
Turbomolecular Pump
Non-Polymeric Membrane Valves
Resistive Random Access Memory
Plasma Processing
Chalcogenide Materials
Wafer Processing
High Aspect Ratio Patterning
Thermal Etching
Gate-All-Around Structure
106 patents (USPTO):Explore Patents

Sure, I'd be delighted to assist with that. Here is the article about inventor Thorsten B. Lill:

Title: Thorsten B. Lill: Pioneering Innovations in Semiconductor Technology

Introduction: Thorsten B. Lill is a prominent inventor based in Sunnyvale, CA, with a remarkable track record of 99 patents to his name. His groundbreaking work in semiconductor technology has solidified his position as a thought leader in the industry.

Latest Patents:

1. Conformal damage-free encapsulation of chalcogenide materials: Thorsten B. Lill's cutting-edge patent focuses on methods and apparatuses for forming an encapsulation bilayer over chalcogenide material on a semiconductor substrate. By utilizing advanced techniques such as PP-PECVD and PEALD, he has revolutionized the process of encapsulating sensitive materials, paving the way for enhanced semiconductor performance.

2. Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment: In another groundbreaking patent, Lill introduces non-elastomeric, non-polymeric, non-metallic membrane valves suitable for high-vacuum applications. This innovation ensures optimal functionality even under sub-atmospheric pressure conditions, overcoming traditional limitations of elastomeric membrane valves.

Career Highlights: Thorsten B. Lill is a key figure at Lam Research Corporation, a leading semiconductor equipment manufacturing company. His expertise and dedication have played a crucial role in shaping the company's innovative approach to semiconductor technology.

Collaborations: Lill collaborates closely with accomplished professionals such as Meihua Shen and Harmeet Singh. Together, they form a dynamic team that consistently pushes the boundaries of semiconductor technology.

Conclusion: Thorsten B. Lill's exceptional contributions to the field of semiconductor technology underscore his commitment to driving innovation and excellence. With a wealth of patents and a sterling reputation, he continues to inspire the next generation of inventors in the industry.

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