Inventors with similar research interests:
Location History:
- Union City, CA (US) (2003 - 2013)
- Fremont, CA (US) (1990 - 2024)
- Newark, CA (US) (2022 - 2024)
Company Filing History:
45 out of 3,783 
4 out of 5 
2 out of 13,726 
Years Active: 1990-2025
Areas of Expertise:
Title: Innovations and Achievements of Samantha SiamHwa Tan
Introduction
Samantha SiamHwa Tan is a prominent inventor based in Fremont, CA, whose contributions to semiconductor technology are marked by 54 patents. Her work focuses on critical aspects of semiconductor manufacturing processes, showcasing innovative approaches that enhance efficiency and precision.
Latest Patents
Among her latest patents are methods for carbon-based depositions utilized for critical dimension control during high aspect ratio feature etches. One noteworthy patent details the fabrication of a semiconductor substrate by vertical etching and subsequent deposition of an amorphous carbon liner onto the sidewalls of features. This iterative process ensures that the etch reaches the desired depth while resisting lateral etching, consequently improving the integrity of the features. Another significant patent involves the dry development of resists, which utilizes a chemical compound for patterning masks essential in high-resolution patterning. This method emphasizes the removal of either exposed or unexposed portions of the resist on a semiconductor substrate, demonstrating her advanced expertise in photopatterned resist technologies.
Career Highlights
Samantha's career spans established companies such as Lam Research Corporation and Chemtrace Corporation, where she applied her profound knowledge of semiconductor processes. Her work in these organizations has significantly advanced the field and contributed to the development of innovative solutions for semiconductor manufacturing.
Collaborations
Throughout her career, Samantha has had the privilege of collaborating with skilled professionals, including her coworkers Yang Pan and Wenbing Yang. These collaborations have fostered an environment of innovation and sparked the development of pioneering technologies in the semiconductor industry.
Conclusion
Samantha SiamHwa Tan's contributions to semiconductor technology are underscored by her extensive patent portfolio and impactful collaborations. Her innovative work continues to shape the industry's landscape, paving the way for future advancements in semiconductor manufacturing processes. Her commitment to innovation exemplifies the role of inventors in driving technological progress.