The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
Oct. 18, 2023
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Mariusch Gregor, Gilroy, CA (US);
Theodoros Panagopoulos, Los Gatos, CA (US);
Thorsten Bernd Lill, Kalaheo, HI (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
F16K 99/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F16K 99/0015 (2013.01); F16K 99/0028 (2013.01); F16K 99/0059 (2013.01); H01L 21/67017 (2013.01);
Abstract
Non-elastomeric, non-polymeric, non-metallic membrane valves for use in high-vacuum applications are disclosed. Such valves are functional even when the fluid-control side of the valve is exposed to a sub-atmospheric pressure field which may generally act to collapse/seal traditional elastomeric membrane valves.