Location History:
- Austin, TX (US) (1992)
- Sunnyvale, CA (US) (1999 - 2011)
- Palm Coast, FL (US) (2018 - 2021)
Company Filing History:
Years Active: 1992-2021
Title: Thomas E. Seidel: Innovator in Nanoimprint Lithography and Advanced Manufacturing
Introduction: Thomas E. Seidel is a prominent inventor based in Sunnyvale, California, renowned for his contributions to the fields of nanoimprint lithography and advanced semiconductor technology. With an impressive portfolio of 22 patented inventions, Seidel's work focuses on enhancing manufacturing processes and the fabrication of intricate structures, which are pivotal in the evolution of modern electronics.
Latest Patents: Among his latest innovations, Seidel has developed two notable patents. The first patent is titled "Method and structure for nanoimprint lithography masks using optical film coatings." This invention presents structures and associated methods designed for reducing physical feature sizes on masks utilized in imprint lithography, targeting applications in advanced semiconductor and data storage devices. The second patent, "Limited dose and angle directed beam assisted ALE and ALD processes for localized coatings on non-planar surfaces," outlines processes for localized etching of films on the sidewalls of complex 3D features, such as trenches or FinFET arrays. This process introduces a two-step etching methodology that employs an angle-directed ion implant beam, aligning onto localized regions to enhance functionalization.
Career Highlights: Seidel's career boasts significant experience in the semiconductor industry, including his tenure at Genus, Inc., where he honed his expertise in advanced manufacturing techniques and innovation development. His patents reflect a strong commitment to improving efficiencies and capabilities within the technology sector.
Collaborations: Throughout his career, Seidel has collaborated with notable figures in the industry, including colleagues such as Carl J. Galewski and Ana R. Londergan. These partnerships have contributed to the successful development and implementation of cutting-edge technologies.
Conclusion: Thomas E. Seidel's innovative spirit and dedication to advancing semiconductor technology through his impressive portfolio of patents underscore his importance in the research and development landscape. His work continues to influence the future of manufacturing techniques, establishing him as a key figure in the ongoing evolution of electronic devices.