Company Filing History:

15 out of 10,295

Tokyo Electron Limited

Toyko Electron Limited

patents

where one patent can have more than one assignee

Years Active: 2005-2023

Loading Chart...

16 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 11676847 - Substrate placing table and substrate processing apparatus (2023-06-13),

2. 11508603 - Substrate placing table and substrate processing apparatus (2022-11-22),

3. 11217470 - Substrate placing table and substrate processing apparatus (2022-01-04),

4. 8569186 - Plasma CVD method, method for forming silicon nitride film and method for manufacturing semiconductor device (2013-10-29),

5. 8366953 - Plasma cleaning method and plasma CVD method (2013-02-05),

6. 8329596 - Plasma CVD method, method for forming silicon nitride film and method for manufacturing semiconductor device (2012-12-11),

7. 8318614 - Method for forming silicon nitride film, method for manufacturing nonvolatile semiconductor memory device, nonvolatile semiconductor memory device and plasma apparatus (2012-11-27),

8. 8258571 - MOS semiconductor memory device having charge storage region formed from stack of insulating films (2012-09-04),

9. 8138103 - Plasma CVD method, method for forming silicon nitride film and method for manufacturing semiconductor device (2012-03-20),

10. 8119545 - Forming a silicon nitride film by plasma CVD (2012-02-21),

11. 8114790 - Plasma CVD method, silicon nitride film formation method, semiconductor device manufacturing method, and plasma CVD apparatus (2012-02-14),

12. 7915177 - Method of forming gate insulation film, semiconductor device, and computer recording medium (2011-03-29),

13. 7674722 - Method of forming gate insulating film, semiconductor device and computer recording medium (2010-03-09),

14. 7304002 - Method of oxidizing member to be treated (2007-12-04),

15. 7156923 - Silicon nitride film forming method, silicon nitride film forming system and silicon nitride film forming system precleaning method (2007-01-02),

Title: Innovations of Tatsuo Nishita: A Visionary Inventor from Amagasaki

Introduction

Tatsuo Nishita, a prominent inventor based in Amagasaki, Japan, has made significant contributions to the field of substrate processing technology. With a commendable portfolio of 16 patents, Nishita's inventions are at the forefront of advancing manufacturing and processing techniques.

Latest Patents

Among his latest patents is the innovative "Substrate Placing Table and Substrate Processing Apparatus." This exemplary embodiment encompasses a sophisticated design featuring a base and an electrostatic chuck. The electrostatic chuck incorporates a lamination layer portion, intermediate layer, and covering layer, enhancing the efficiency and reliability of substrate handling. The innovative construction consists of multiple layers including a first layer, an electrode layer, and a second resin layer topped with a ceramic covering, ensuring optimal performance in substrate processing applications.

Career Highlights

Throughout his career, Tatsuo Nishita has collaborated with notable organizations, such as Tokyo Electron Limited and Tohoku University. His experience in these esteemed institutions has provided him with a robust foundation to drive innovative solutions in substrate technology.

Collaborations

Nishita has had the pleasure of working alongside talented individuals, including Toshio Nakanishi and Masayuki Kohno. These collaborations have not only influenced his inventions but have also fostered an environment of creativity and innovation.

Conclusion

Tatsuo Nishita stands as a vital figure in the realm of substrate processing inventions. His impressive array of patents and collaborations with leading companies and talented coworkers reflect his relentless pursuit of innovation and excellence. As the industry continues to evolve, Nishita's contributions will undoubtedly play a key role in shaping the future of technology.

This text is generated by artificial intelligence and may not be accurate.

Please report any incorrect information to support@idiyas.com

Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.