Chiyoda, Japan

Tatehito Usui

This inventor holds 65 USPTO granted patents and 6 published patent applications, primarily in Plasma Processing (CPC class H01L). Top assignees: Hitachi, Ltd., Hitachi-High-Technologies Corporation, Hitachi High-Tech Corporation. Active years: 1993-2026.

USPTO Granted Patents = 65 

% Patents Active = 75.4

Average Co-Inventor Count = 4.3

ph-index = 12

Forward Citations = 1,257(Granted Patents)

Forward Citations (Not Self Cited) = 1,208(Dec 10, 2025)


Inventors with similar research interests:


Location History:

  • Ibaraki, JP (1993)
  • Chiyoda-machi, JP (1999 - 2003)
  • Tsuchiura, JP (2003)
  • Niihari, JP (2002 - 2010)
  • Chiyoda, JP (2003 - 2011)
  • Kasumigaura, JP (2011 - 2014)
  • Tokyo, JP (2015 - 2024)

Company Filing History:


Years Active: 1993-2026

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Areas of Expertise:
Plasma Processing
Wafer Processing
Etching Methods
Film Thickness
Emission Spectroscopy
Semiconductor Fabrication
Processing Control
Measurement Systems
Endpoint Detection
Operational Methods
Substitute Samples
65 patents (USPTO):Explore Patents

Title: The Innovative Mind of Tatehito Usui

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Conclusion: Tatehito Usui's relentless pursuit of innovation and his passion for creating a better future through technology make him a true trailblazer in the world of inventions. His work continues to inspire and drive progress in the ever-evolving tech landscape.

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