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For the Inventor, By the Inventor

Bethel, CT, United States of America

Stanislav Y Smirnov

This inventor holds 30 USPTO granted patents and 1 published patent application and 3 EPO patents, primarily in Optical Systems. Top assignees: Asml Holding N.v., Asml Netherlands B.v.. Active years: 2004-2022.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Stanislav Y Smirnov. Retrieved from https://idiyas.com/inventor/stanislav-y-smirnov

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 30 

% Patents Active = 66.7


Average Co-Inventor Count = 2.5

ph-index = 5

Forward Citations = 528(Granted Patents)


Location History:

  • Bethel, CT (US) (2004 - 2014)
  • Danbury, CT (US) (2015 - 2022)

Company Filing History:

goldMedal26 out of 630 
 
Asml Holding N.v.
 patents
silverMedal7 out of 5,075 
 
Asml Netherlands B.v.
 patents
where one patent can have more than one assignee

Years Active: 2004-2022

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Areas of Expertise:
Lithographic Apparatus
Metrology Apparatus
Beam Splitting Prism
Variable Corrector
Illumination System
Catadioptric Optical System
Inspection Apparatus
Optical Pupil Symmetrization
High Numerical Aperture
Scatterometry
Maskless Lithography
Refractive Index Distribution
30 patents (USPTO):Explore Patents
1. 11537055 - Lithographic apparatus, metrology apparatus, optical system and method (2022-12-27),
2. 11126007 - Beam splitting prism systems (2021-09-21),
3. 10852247 - Variable corrector of a wave front (2020-12-01),
4. 10747010 - Beam splitting prism systems (2020-08-18),
5. 10724961 - Method and device for focusing in an inspection system (2020-07-28),
6. 10495889 - Beam homogenizer, illumination system and metrology system (2019-12-03),
7. 10107761 - Method and device for focusing in an inspection system (2018-10-23),
8. 10048591 - Catadioptric illumination system for metrology (2018-08-14),
9. 9904173 - Method and apparatuses for optical pupil symmetrization (2018-02-27),
10. 9285687 - Inspection apparatus, lithographic apparatus, and device manufacturing method (2016-03-15),
11. 9069260 - Catadioptric illumination system for metrology (2015-06-30),
12. 8982481 - Catadioptric objective for scatterometry (2015-03-17),
13. 8634064 - Optical system for increasing illumination efficiency of a patterning device by producing a plurality of beams (2014-01-21),
14. 8259398 - High numerical aperture catadioptric objectives without obscuration and applications thereof (2012-09-04),
15. 8107173 - Catadioptric optical system for scatterometry (2012-01-31),

Title: The Innovative Mind of Stanislav Y Smirnov

Introduction:

Stanislav Y Smirnov, a prolific inventor hailing from Bethel, CT (US), has made significant strides in the field of technology with an impressive portfolio of 30 patents to his name.

Latest Patents:

Among his latest patents is a cutting-edge Lithographic Apparatus, Metrology Apparatus, Optical System, and Method. This patent introduces a method to reduce the sensitivity of a level sensor, enabling precise measurements of substrate height while mitigating variations in optical component properties.

Another notable invention is the Beam Splitting Prism Systems. This system includes a polarizing beam splitter (PBS) surface that generates sub-beams with varying polarization information, enhancing optical path consistency and achieving a predetermined polarization extinction ratio.

Career Highlights:

Stanislav Y Smirnov has showcased his innovative prowess while working with renowned companies such as ASML Holding N.V. and ASML Netherlands B.V. His contributions have played a vital role in driving technological advancements in the industry.

Collaborations:

Throughout his career, Stanislav collaborated with esteemed colleagues, including Yevgeniy Konstantinovich Shmarev and Mark L. Oskotsky. Together, they have pushed the boundaries of innovation and contributed to the development of groundbreaking technologies.

Conclusion:

In conclusion, Stanislav Y Smirnov stands as a visionary inventor who continues to revolutionize the field of technology with his groundbreaking patents and collaborations. His creative thinking and dedication to excellence have made a lasting impact on the industry, shaping the future of innovation.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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