The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2020
Filed:
Dec. 12, 2018
Asml Holding N.v., Veldhoven, NL;
Douglas C. Cappelli, Norwalk, CT (US);
Stanislav Smirnov, Danbury, CT (US);
Richard Carl Zimmerman, Brookfield, CT (US);
Joshua Adams, Wilton, CT (US);
Alexander Kenneth Raub, Danbury, CT (US);
Yevgeniy Konstantinovich Shmarev, Lagrangeville, NY (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
According to one embodiment, a prism system is provided. The prism system includes a polarizing beam splitter (PBS) surface. The PBS surface is configured to generate first and second sub-beams having corresponding first and second polarization information from a received beam, the second polarization information being different than the first polarization information. A first optical path of the first sub-beam within the prism system has substantially same length as a second optical path of the second sub-beam within the prism system. Additionally or alternatively, the first sub-beam achieves a predetermined polarization extinction ratio.